Suss deep UV Mask Aligner in Class 100 room
Nikon Optical microscope with 20x eye piece and 5x, 10x, 20x, 50x objectives.
wet bench with chemical cabnet in Class 100 room
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Wire bonder in Class 1000 room
probe station in Class 1000 room
e-beam evaporation system in Class 1000 room
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